A mechanistic based cavitation model that considers nucleation, early-stage growth and sintering under creep-fatigue interaction is proposed. The number density of cavities ρ and their evolution during multi-cycle creep-fatigue loading are predicted. Both the cavity nucleation and early-stage growth rates, controlled by grain boundary (GB) sliding mechanism during the tension phase, are formulised as a function of local normal stress σ _n. The cavity sintering that occurs during the compression phase is described as a function of σ _n, but the mechanism switches to the unconstrained GB diffusion. By examining various load waveform parameters, results provide important insights into experimental design of studying the creep-dominated cavitation process under creep-fatigue interaction. First, creep-fatigue test with initial compression will promote higher ρ value compared to that with initial tension, if the unbalanced stress hold time in favour of tension is satisfied. Second, the ρ value does not have a monotonic dependence on either the compressive hold time or stress level, because of their competing effect on nucleation and sintering. Third, the optimum value of stress variation rate exists in terms of obtaining the highest ρ value due to sintering effect.