Figure S10. Calculation, characterization, and correction of mass flow. a Flow characteristics of air pump and the schematic diagram of the measurement method. (Supplementary Note 10) b The component is inserted between two air tanks to characterize the flow function of the corresponding air passage. (Supplementary Note 11) c Flow function of corresponding air passage (the results in the graph are \(\psi_{t1}\) ). d Characterization method of the valve switch characteristics. e Opening and closing characteristics of solenoid valves. f Experimentally obtained open degree when ON-OFF command change occurs at \(\Delta t\)  = 0.05, 0.10, 0.15, 0.20, and 0.25 s. (Supplementary Note 12)

Supplementary Notes

Supplementary Note 1. Detailed modeling of m-SPAs